wearable and implantable applications. Among the WBG semiconductors, the ZnO
stands out due to its biodegradability. ZnO can be dissolved not only in water, but also in
NaOH solution, ammonia, and blood serum of horses [2]. Besides the ZnO biodegrad
ability in the environmental impact, it is also useful for biomedical devices, which can
degrade in the body after serving its purpose [2]. In contrast, due to their chemical in
ertness, GaN and SiC have been extensively studied for wearable and implantable de
vices, where they can work properly for several decades in situ [2]. Although Al is known
for its toxicity, studies showed that in the AlGaN/GaN heterostructures, a low compo
sition of Al does not result in adverse effects on the cell’s culture [22]. Further, SiC
electronic devices are able to work efficiently in a biofluid without any encapsulation
layers [21].
13.4 Which Techniques Have Been Used to Fabricate These Devices?
Even though WBG devices require specific properties already mentioned, a factor as
important as their application in bioelectronics is manufacturing. The mechanical capa
city of these materials interferes directly with their effectiveness, such as stretchability
and flexibility [2]. Therefore, the biggest challenge over the years is to manufacture these
devices on flexible substrates [23] since each mechanism has its limitations. Thus, the
preparation of WBG semiconductors can be performed by different techniques directly on
the flexible substrate or pre-prepared on another material and transferred to the main
substrate. Several methods have been developed and improved, and the most common
techniques are described (Table 13.2) with their highlights and limitations.
13.4.1 Direct Growth of Nanostructures on Flexible Substrates
Various methods were developed aiming to promote the growth of nanostructures di
rectly on flexible substrates. The main challenge here is the reaction temperature that the
nucleation process requires once the soft substrate does not tolerate such high tempera
tures as those of the direct growth reactions. To overcome this obstacle, techniques were
developed and reported involving a combined process.
Examples of low-temperature techniques that are promising are electrochemical de
position (ECD) and chemical solution growth along with atomic layer deposition, for in
stance. These processes can be combined in three steps of seeding-annealing-growth (SAG).
Reddy et al. [24] related the combined SAG method in which seed layers of ZnO were
deposited on a nickel-coated flexible substrate using ECD. Then the material was annealed
in the air to obtain a pure crystalline ZnO phase, and in the third step, the ZnO nanorods
were developed using the chemical deposition process. Pradhan et al. [25] report a suc
cessfully direct synthesis of two different structures, nanopillars and nanowalls, of ZnO on
a plastic substrate (polyester) by using ECD at low temperature without templates.
Another widely used method is the hydrothermal process (Figure 13.4), which consists of
a process where the substrate is coated and dried, and subsequently, it is soaked in a so
lution with nanoparticles of interest, repeating the deposition process for the concentrated
film. The nucleation of these sites occurs, and at a determined ideal temperature, it favors
the growth of nanostructures, which depends directly on the main parameters as bath
temperature, growth time, and seed coating condition [26].
Wide Bandgap Semiconductors
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